Electronic Device

ABSTRACT

There is provided an electronic device having high reliability and high color reproducibility. A pixel structure is made such that a switching FET ( 201 ) and an electric current controlling FET ( 202 ) are formed on a single crystal semiconductor substrate ( 11 ), and an EL element ( 203 ) is electrically connected to the electric current controlling FET ( 202 ). The fluctuation in characteristics of the electric current controlling FET ( 202 ) is very low among pixels, and an image with high color reproducibility can be obtained. By taking hot carrier measures in the electric current controlling FET ( 202 ), the electronic device having high reliability can be obtained.

This application is a continuation of copending U.S. application Ser.No. 10/958,835, filed on Oct. 5, 2004 which is a continuation of U.S.application Ser. No. 10/455,044, filed on Jun. 5, 2003 (now U.S. Pat.No. 6,809,343 issued Oct. 26, 2004) which is a continuation of U.S.application Ser. No. 09/697,069, filed on Oct. 26, 2000 (now U.S. Pat.No. 6,580,094 issued Jun. 17, 2003).

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an electronic device including anelement having a luminous material placed between electrodes and anelectronic instrument using the electronic device as a display portion(indication display or indication monitor). Particularly, the presentinvention relates to an electronic device using a luminous material(hereinafter referred to as EL material) by which EL (ElectroLuminescence) is obtained.

2. Description of the Related Art

In recent years, an electronic device (hereinafter referred to as ELdisplay device) which uses a light-emitting device (hereinafter referredto as an EL element) using an EL phenomenon of a luminous material hasbeen developed. Since the EL display device is a display device usingthe light-emitting device, a backlight as in liquid crystal display isnot necessary, and further, since an angle of visibility is wide, the ELdisplay device has attracted attention as a display portion of aportable equipment used outdoors.

There are two kinds of EL display devices, that is, a passive type(simple matrix type) and an active type (active matrix), and both typeshave been vigorously developed. Particularly, at present, the activematrix EL display device has attracted a great deal of attention. Withrespect to the EL material which becomes a luminescent layer emittingEL, there are an organic EL material and an inorganic EL material, andfurther, the organic EL material is classified into a low molecular(monomer) organic EL material and a high molecular (polymer) organic ELmaterial. Especially, attention has been paid to the polymer organic ELmaterial which is easier to handle and higher in heat resistance thanthe low molecular organic EL material. Incidentally, a luminous deviceusing the organic EL material is called OLED (Organic Light EmittingDiodes) in Europe.

The active matrix EL display device is characterized in that an electricfield effect transistor (hereinafter referred to as FET) is provided ineach of pixels constituting a pixel portion, and an amount of electriccurrent made to flow through an EL element is controlled by the FET.However, there has been a problem in that when electricalcharacteristics of the FETs vary among pixels, luminous characteristicsof the EL elements provided in the respective pixels also vary.

SUMMARY OF THE INVENTION

The present invention has been made in view of the above problem and hasan object to provide an electronic device in which fluctuation in theluminescence properties of EL elements among pixels is low and colorreproducibility is high. Another object of the present invention is toprovide a highly reliable electronic device. Further another object ofthe present invention is to provide an electronic instrument using theelectronic device as a display portion.

Still another object of the present invention is to provide a processfor reducing the manufacturing cost of the electronic device having highcolor reproducibility described above.

The present invention is characterized in that for the purpose ofsuppressing the fluctuation of electrical characteristics of FETs amongpixels to a minimum, a single crystal semiconductor substrate is used asa substrate, and an electronic device is formed by using the FET formedon the single crystal semiconductor substrate. Besides, the presentinvention is characterized in that since the single crystal substratehaving such a thickness as to enable formation of the FET does nottransmit light, an EL element is formed so that a cathode is directlyconnected to the FET.

Further, the present invention is characterized in that a plurality ofFETs are fowled in one pixel, and a structure is optimized in accordancewith the role of each FET, so that a highly reliable electronic deviceis obtained. Specifically, the present invention is characterized inthat n-channel FETs are used as a switching element and an electriccurrent controlling element, and arrangements of LDD regions of both aremade different from each other.

Moreover, in the present invention, a process of forming a plurality ofelectronic devices from a large substrate is used to realize a reductionin the manufacturing cost of the electronic device, that is, a reductionof the cost of the electronic device. The present invention ischaracterized in that the process capable of using the existing liquidcrystal line is employed and investment in plant and equipment issuppressed to a minimum, so that a substantial reduction in themanufacturing cost is realized.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a view showing a sectional structure of a pixel portion of anelectronic device.

FIGS. 2A and 2B are views showing an upper surface structure of a pixelportion and its constitution.

FIGS. 3A to 3D are views showing a fabricating process of an activematrix substrate.

FIGS. 4A to 4D are views showing the fabricating process of the activematrix substrate.

FIGS. 5A and 5B are views showing the fabricating process of the activematrix substrate.

FIG. 6 is an enlarged view of a pixel portion.

FIG. 7 is a view showing a circuit structure of an EL display device.

FIGS. 8A and 8B are views showing an EL display device.

FIGS. 9A to 9C are views showing circuit structures of pixels.

FIGS. 10A to 10D are views showing sectional structures of electriccurrent controlling FETs.

FIGS. 11A-11F are views showing a process of obtaining multiple numberof EL display devices.

FIGS. 12A-12F are views showing the process of obtaining the multiplenumber of EL display devices.

FIGS. 13A-13F are views showing the process of obtaining the multiplenumber of EL display devices.

FIGS. 14A to 14F are views showing concrete examples of electronicdevices.

FIGS. 15A and 15B are views showing concrete examples of electronicdevices.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

An embodiment mode of carrying out the present invention will bedescribed with reference to FIG. 1 and FIGS. 2A and 2B. FIG. 1 is asectional view of a pixel portion of an EL display device of the presentinvention, FIG. 2A is its top view, and FIG. 2B is a view showing itscircuit structure. Actually, a plurality of pixels is arranged in matrixform so that a pixel portion (image display portion) is formed.Incidentally, common symbols are used in FIG. 1 and FIGS. 2A and 2B,both drawings may be suitably referred to. Although the top view ofFIGS. 2A and 2B show two pixels, both pixels have the same structure.

In FIG. 1, reference numeral 11 designates a single crystalsemiconductor substrate; and 12, an insulating film (hereinafterreferred to as field insulating film) for separating elements. As thesubstrate 11, a single crystal silicon substrate or a single crystalsilicon germanium substrate may be used, and both a p-type substrate andan n-type substrate may be used.

Here, two FETs are formed in a pixel. Reference numeral 201 designatesan FET (hereinafter referred to as switching FET) functioning as aswitching element; and 202, an FET (hereinafter referred to as electriccurrent controlling FET) functioning as an electric current controllingelement for controlling an amount of electric current made to flow to anEL element. Both are made of an n-channel FET.

The n-channel FET is advantageous in that it can be formed of anoccupied area smaller than that of a p-channel FET in the case where thesame amount of electric current is made to flow. In a pixel portion ofan EL display device with high fineness, since the size of one pixelbecomes as very small as ten and several μm square, greater flexibilityin a design margin can be obtained when the n-channel FET is used.

The p-channel FET has such merits that hot carrier injection becomeshardly a problem and the off current value is low, and examples in whichit is used as a switching FET or an electric current controlling FEThave been already reported. However, in the present invention, byarrangement of LDD regions, the problem of the hot carrier injection isalso solved in the n-channel FET, and FETs in all pixels can be made then-channel FETs.

However, in the present invention, it is not necessary to limit theswitching FET and the electric current controlling FET to the n-channelFET, but it is also possible to use the p-channel FET in both or eitherone.

The switching FET 201 is constituted by a source region 13, a drainregion 14, LDD regions 15 a to 15 f, high concentration impurity regions16 a and 16 b, channel formation regions 17 a to 17 c, a gate insulatingfilm 18, gate electrodes 19 a to 19 c, a first interlayer insulatingfilm 20, a source wiring line 21, and a drain wiring line 22. The sourceregion 13, the drain region 14, the LDD regions 15 a to 15 f, and thehigh concentration impurity regions 16 a and 16 b are formed by addingan element in group 15 of the periodic table into the single crystalsemiconductor substrate 11.

Besides, as shown in FIG. 2A, the gate electrodes 19 a to 19 c are partof a gate wiring line 211, and a portion where the gate wiring line 211overlaps with the channel fointation region of the FET is particularlycalled the gate electrode. Here, the FET of a double gate structurehaving the two channel formation regions is formed. Of course, inaddition to the double gate structure, a so-called multi-gate structure(structure having two or more channel founation regions connected inseries with each other) such as a triple gate structure may be adopted.

The multi-gate structure is very effective in lowering the off currentvalue, and in the present invention, the switching FET 201 of the pixelis made the multi-gate structure so that a switching element having thelow off current value is realized. Further, in the switching FET 201,the LDD regions 15 a to 15 f are provided so that they do not overlapwith the gate electrodes 19 a to 19 c through the gate insulating film18. The structure like this is very effective in lowering the offcurrent value.

Incidentally, it is further preferable in lowering the off current valueto provide an offset region (a region which has the same composition asthe channel formation region and to which a gate voltage is not applied)between the channel formation region and the LDD region. Besides, in thecase of the multi-gate structure having two or more gate electrodes, ahigh concentration impurity region provided between the channelformation regions is effective in lowering the off current value.

As described above, when the FET of the multi-gate structure is used asthe switching FET 201 of the pixel, the off current value can be madesufficiently low. That the off current value is low means that voltageapplied to the gate of the electric current controlling FET can be keptfor a longer time, and there is obtained a merit that even if acapacitor for holding an electric potential as in FIG. 2 of JapanesePatent Application Laid-open No. Hei 10-189252 is lessened or isomitted, the gate voltage of the electric current controlling FET can bekept until a next writing period.

The electric current controlling FET 202 is constituted by a sourceregion 31, a drain region 32, an LDD region 33, a channel formationregion 34, a gate insulating film 18, a gate electrode 35, a firstinterlayer insulating film 20, a source wiring line 36, and a drainwiring line 37. Incidentally, although the gate electrode 35 has asingle gate structure, a multi-gate structure may be adopted.

The drain of the switching FET 201 is connected to the gate of theelectric current controlling FET 202. Specifically, the gate electrode35 of the electric current controlling FET 202 is electrically connectedto the drain region 14 of the switching FET 201 through the drain wiringline 22. Besides, the source wiring line 36 is electrically connected toan electric current supply line (also referred to as power supply line)212 (see FIG. 2A).

The electric current controlling FET 202 is an element for controllingan amount of electric current injected to an EL element 203, and it isnot preferable to make a large electric current flow in view ofdeterioration of the EL element. Thus, it is preferable to design thechannel length (L) sufficiently long so that an excessive electriccurrent does not flow through the electric current controlling FET 202.It is desirably designed such that the electric current is 0.5 to 2 μA(preferably 1 to 1.5 μA) per pixel.

Based on the above, as shown in FIG. 6, when a channel length of theswitching FET is L1 (L1=L1 a+L1 b+L1 c), a channel width is W1, achannel length of the electric current controlling FET is L2, and achannel width is W2, it is preferable that W1 is made 0.1 to 5 μm(typically 0.5 to 2 μm), and W2 is made 0.5 to 10 μm (typically 2 to 5μm). Besides, it is preferable that L1 is made 0.2 to 18 μm (typically 2to 15 μm), and L2 is made 1 to 50 μm (typically 10 to 30 μm). However,the present invention is not limited to the above numerical values.

Besides, the length (width) of the LDD region fouled in the switchingFET 201 may be made 0.5 to 3.5 μm, typically 2.0 to 2.5 μm.

Besides, the EL display device shown in FIG. 1 is characterized in thatin the electric current controlling FET 202, the LDD region 33 isprovided between the drain region 32 and the channel formation region34, and the LDD region 33 overlaps with the gate electrode 35 throughthe gate insulating film 18.

Since the electric current controlling FET 202 supplies an electriccurrent for making the EL element 203 emit light, it is preferable totake measures against deterioration due to hot carrier injection asshown in FIG. 1. The arrangement of the LDD region of FIG. 1 is thestructure as the measures against the deterioration due to the hotcarrier injection. Incidentally, in order to suppress the off electriccurrent as well; it is also effective to make the LDD region overlapwith a part of the gate electrode. In this case, a region where itoverlaps with the gate electrode suppresses the hot carrier injection,and a region where it does not overlap with the gate electrodesuppresses the off current value. Besides, since the direction of flowof carriers (in this case, an electron) in the electric currentcontrolling FET 202 is always the same, if the LDD region 33 is providedonly at the side of the drain region 31, it is sufficient for themeasures against the hot carrier.

At this time, it is appropriate that the length of the LDD regionoverlapping with the gate electrode is made 0.1 to 3 μm (preferably 0.3to 1.5 μm). In the case where the LDD region not overlapping with thegate electrode is provided, it is appropriate that the length is made1.0 to 3.5 μm (preferably 1.5 to 2.0 μm).

It is also possible to actively use a parasitic capacitance (alsoreferred to as gate capacitance) fainted between the gate electrode andan active layer overlapping with the gate electrode through the gateinsulating film as a capacitor for electric potential holding (electriccharge holding).

In the present embodiment, by fainting the LDD region 33 shown in FIG.1, the gate capacitance between the gate electrode 35 and the activelayer (especially the LDD region 33) is made large, and the gatecapacitance is used as a capacitor for electric potential holding as inFIG. 2 of Japanese Patent Application Laid-open No. Hei 10-189252. Ofcourse, although a capacitor may be separately formed, when thestructure as in this example is adopted, the capacitor for electricpotential holding may not be used.

Especially, in the case where the EL display device of the presentinvention is made to operate in a digital driving system, the capacitorfor the electric potential holding may be very small. For example, ascompared with an analog driving system, the capacitance may be about ⅕or about 1/10. The concrete numerical value depends on the performanceof the switching FET and the electric current controlling FET so that itcan not be generally indicated, but 5 to 30 fF (femtofarad) may besufficient.

Further, if the structure of the switching FET is made the multi-gatestructure as shown in FIG. 1 and the off current value is made small,the capacitance required by the capacitor for electric potential holdingbecomes further small.

Besides, in the present embodiment, although the electric currentcontrolling FET 202 is shown as a single gate structure, a multi-gatestructure in which a plurality of FETs are connected in series with eachother may be adopted. Further, such a structure may be adopted that achannel formation region is substantially divided into plural parts byconnecting a plurality of FETs in parallel with each other, so that heatradiation can be made at high efficiency. Such a structure is effectiveas measures against deterioration due to heat.

Reference numeral 38 designates a first passivation film, and its filmthickness may be made 10 nm to 1 μm (preferably 200 to 500 mm). As amaterial, an insulating film containing silicon (especially a siliconnitride oxide film or a silicon nitride film is preferable) can be used.Besides, it is effective to make the first passivation film 38 have aheat radiation effect.

A second interlayer insulating film (flattening film) 39 is formed onthe first passivation film 38, so that a stepped portion formed by theFET is flattened. As the second interlayer insulating film 39, anorganic resin film is preferable, and polyimide, polyamide, acrylicresin, BCB (benzocyclobutene) or the like may be used. Of course, aslong as sufficient flattening can be made, an inorganic film may beused.

It is very important to flatten the stepped portion due to the FET bythe second interlayer insulating film 39. Since a subsequently formed ELlayer is very thin, there is a case where poor light emission occurs dueto the existence of the stepped portion. Thus, it is desirable to makeflattening before the pixel electrode is formed so that the EL layer canbe formed on the surface as flatly as possible.

Reference numeral 40 designates a pixel electrode (cathode of the ELelement) made of a conductive film having high reflectivity and low workfunction, and after a contact hole (opening hole) is formed in thesecond interlayer insulating film 39 and the first passivation film 38,it is formed so as to be connected to the drain wiring line 37 of theelectric current controlling FET 202 at the formed opening hole portion.As the pixel electrode 40, it is preferable to use the conductive filmhaving low resistance, such as aluminum alloy or copper alloy. Ofcourse, a laminate structure with another conductive film may be used.

Next, an insulating film 41 is formed so as to cover an end portion(corner portion) of the pixel electrode 40. This is because when anorganic EL material of a luminescent layer is formed at the end portionof the pixel electrode 40, there is a fear that it is intensivelydeteriorated by the concentration of an electric field. This insulatingfilm 41 is provided so as to fill a gap between a pixel and a pixel(between a pixel electrode and a pixel electrode).

Next, as a luminescent layer 42, an EL material is formed. As the ELmaterial, although both an inorganic EL material and an organic ELmaterial may be used, the organic EL material having a low drivingvoltage is preferable. Besides, as the organic EL material, both a lowmolecular (monomer) organic EL material and a high molecular (polymer)organic EL material may be used.

As the monomer organic material, although Alq₃(tris-8-quinolilite-aluminum) or DSA (distyrylarylene derivative) istypically known, any well-known material may be used.

Besides, as a polymer organic EL material, polyparaphenylene vinylene(PPV) system, polyvinylcarbazole (PVK) system, polyfluorene system orthe like can be cited. Of course, any well-known materials may be used.Specifically, cyano polyphenylene vinylene may be used for theluminescent layer emitting red light, polyphenylene vinylene may be usedfor the luminescent layer emitting green light, and polyphenylenevinylene or polyalkyl phenylene may be used for the luminescent layeremitting blue light. It is appropriate that the film thickness is made30 to 150 nm (preferably 40 to 100 nm).

Besides, it is also possible to obtain desired light emission by addinga fluorescent material (typically, coumarin 6, rubrene, Nile red, DCM,quinacridone etc.) into the luminescent layer to move the luminescentcenter to the fluorescent material. Any well-known fluorescent materialmay be used.

In the case where the monomer organic EL material is used for theluminescent layer 42, it is appropriate that the layer is formed by avacuum evaporation method. In the case where the polymer organic ELmaterial is used, a spin coating method, a printing method, an ink jetmethod, or a dispense method may be used. However, when a film of thepolymer organic EL material is formed, it is desirable to make atreatment atmosphere an inert gas atmosphere containing the leastmoisture. For example, the polymer organic EL material is formed by thespin coating method.

Although the polymer organic EL material is fowled under ordinarypressure, since the organic EL material is easily deteriorated by theexistence of moisture or oxygen, it is necessary to remove such factorsto the utmost. For example, a dry nitrogen atmosphere, a dry argonatmosphere, or the like is preferable. For that purpose, it is desirablethat a fowling apparatus of the luminescent layer is placed in a cleanbooth filled with an inert gas and a film fowling process of theluminescent layer is carried out in the atmosphere.

After the luminescent layer 42 is formed in the manner described above,a hole injection layer 43 is next fowled. As the hole injection layer43, a monomer organic material such as TPD (triphenylamine derivative),CuPc (copper phthalocyanine), or m-MTDATA (starburst amine), or apolymer organic material such as PEDOT (polythiophene), or PAni(polyaniline) is used. Of course, an inorganic material may be used. Thefilm thickness may be 3 to 20 nm (preferably 5 to 15 nm).

However, the above examples are merely examples of the organicmaterials, which can be used for the luminescent layer or the holeinjection layer, and the present invention is not limited to these.Besides, here, although the combination of the luminescent layer and thehole injection layer is shown, in addition, a hole transport layer, anelectron injection layer, an electron transport layer, a hole blockinglayer, or an electron blocking layer may be combined.

An anode 44 made of a transparent conductive film is provided on thehole injection layer 43. In the case of this mode, since light generatedin the luminescent layer 43 is radiated in the direction going away fromthe FET, the anode must be translucent (transparent). As the transparentconductive film, although a compound of indium oxide and tin oxide or acompound of indium oxide and zinc oxide can be used, since the film isformed after the luminescent layer and the hole injection layer with lowheat resistance are fanned, it is preferable to use a material enablingfilm formation at the temperature as low as possible.

The EL element 203 is completed at the point when the anode 44 isformed. Incidentally, the EL element 203 here indicates a capacitorfowled of the pixel electrode (cathode) 40, the luminescent layer 42,the hole injection layer 43, and the anode 44. As shown in FIG. 2A,since the pixel electrode 40 is almost coincident with the area of thepixel, the whole pixel functions as the EL element. Thus, usageefficiency of light emission is very high, and clear image displaybecomes possible.

In this mode, a second passivation film 45 is further provided on theanode 44. As the second passivation film 45; a silicon nitride film orsilicon nitride oxide film is preferable. The object is to shut off theEL element from the external, and has both the meaning of preventingdeterioration of the organic EL material due to oxidation and themeaning of suppressing degassing from the organic EL material. This canraise the reliability of the EL display device.

Besides, the EL display device of the present invention includes a pixelportion constituted by pixels each having the structure as shown in FIG.1, and FETs having different structures are arranged in accordance withthe role in the pixel. By this, a switching FET having the sufficientlylow off current value and an electric current controlling FET resistantto hot carrier injection can be formed in the same pixel, and the ELdisplay device having high reliability and capable of making excellentimage display (having high operation performance) can be obtained.

Besides, with respect to fabrication of the FET, since all ofconventionally known techniques of the IC and LSI can be used, it ispossible to fabricate FETs having less fluctuation in electricalcharacteristics. By this, it is possible to fabricate the EL displaydevice in which fluctuation in luminescent properties of EL elements islow among pixels, and color reproducibility is high.

Embodiment 1

The embodiments of the present invention are explained using FIGS. 3 to5. A method of simultaneous manufacture of a pixel portion, and FETs ofa driver circuit portion formed in the periphery of the pixel portion,is explained here. Note that in order to simplify the explanation, aCMOS circuit is shown as a basic circuit for the driver circuits.

First, as shown in FIG. 3A, a field insulating film 302 is fowled on thep-type single crystal silicon substrate 300 with a oxide silicon film bywell known LOCOS method (local oxidation of silicon). An impurityelement which imparts n-type conductivity (hereinafter referred to as ann-type impurity element) is added and n-well 302 is Banned. Note thatelements residing in periodic table group 15 are generally used as then-type impurity element, and typically phosphorous or arsenic can beused.

Next, as shown in FIG. 3B, a protecting film 303 is fowled with asilicon oxide film having a thickness of 130 nm. This thickness may bechosen within the range of 100 to 200 nm (preferably between 130 and 170nm). Furthermore, other films may also be used providing that they areinsulating films containing silicon. The protecting film 303 is formedso that the single crystal silicon film is not directly exposed toplasma during addition of an impurity, and so that it is possible tohave delicate concentration control of the impurity.

Resist masks 304 a to 304 c are then formed, and an n-type impurityelement is added via the protecting film 303. Note that a plasma dopingmethod is used, which phosphine (PH₃) is plasma activated withoutseparation of mass, and phosphorous is added at a concentration of1×10¹⁸ atoms/cm³ in this embodiment. An ion implantation method, inwhich separation of mass is performed, may also be used, of course.

The dose amount is regulated so that the n-type impurity element iscontained in n-type impurity regions 305, 306, thus formed by thisprocess, at a concentration of 2×10¹⁶ to 5×10¹⁹ atoms/cm³ (typicallybetween 5×10¹⁷ and 5×10¹⁸ atoms/cm³).

Next, as shown in FIG. 3C, resist masks 304 a to 304 c and the protectfilm 303 are removed, and a gate insulating film 307 is fouled byperforming the thermal oxidation method. At the time, the activation ofthe added n-type impurity element is performed. The oxidation time andoxidation temperature is regulated to foam the thermal oxidation filminto 30 to 80 nm thickness (preferably 40 to 60 nm).

This process clarifies the edge of the n-type impurity regions 305, 306,namely, the boundary (junction) between the n-type impurity regions 305,306 and the region around the n-type impurity regions 520, 521, wherethe n-type impurity element is not added. This means that the LDD regionand the channel formation region can form an excellent junction when aTFT is later completed.

Next, a conducting film with a thickness of 200 to 400 nm is farmed nextand patterned, forming gate electrodes 308 to 312 as shown in FIG. 3D.Further, the gate wirings may be formed by a single layer conductingfilm, and when necessary, it is preferable to use a two layer or a threelayer lamination film. All known conducting films can be used as thegate electrode material. However, as stated above, it is preferable touse a material which is capable of being micro-processed, specifically,a material which is capable of being patterned to a line width of 2 μmor less. Typically, it is possible to use a film made of an elementselected from tantalum (Ta), titanium (Ti), molybdenum (Mo), tungsten(W), chromium (Cr), and silicon (Si), a film of nitride of the aboveelement (typically a tantalum nitride film, tungsten nitride film, ortitanium nitride film), an alloy film of combination of the aboveelements (typically Mo—W alloy, Mo—Ta alloy), or a silicide film of theabove element (typically a tungsten silicide film, titanium silicidefilm). Of course, the films may be used as a single layer or a laminatelayer.

In this embodiment, a laminate film of a tungsten nitride (WN) filmhaving a thickness of 30 nm and a tungsten (W) film having a thicknessof 370 nm is used. These may be formed by a sputtering method. When aninert gas of Xe, Ne or the like is added as a sputtering gas, filmpeeling due to stress can be prevented.

The gate electrodes 309 and 312 are formed at this time so as to overlapa portion of the n-type impurity regions 305, 306 with the gateinsulating film 311 interposed therebetween. This overlapping portionlater becomes an LDD region to suppress the injection of hot carriers.

Next, an n-type impurity element (phosphorus is used in this embodiment)is added in a self-aligning manner with the gate electrodes 308 to 312as masks, as shown in FIG. 4A. The addition is regulated so thatphosphorous is added to impurity regions 313 to 319 thus formed at aconcentration of 1/10 to ½ that of the n-type impurity regions 305, 306,(typically between ¼ and ⅓). Specifically, a concentration of 1×10¹⁶ to5×10¹⁸ atoms/cm³ (typically 3×10¹⁷ to 3×10¹⁸ atoms/cm³) is preferable.

Resist masks 320 a to 320 c are formed next as shown in FIG. 4B, and ann-type impurity element (phosphorous is used in this embodiment) isadded, forming impurity regions 321 to 327 containing a highconcentration of phosphorous. Ion doping using phosphine (PH₃) is alsoperformed here, and is regulated so that the phosphorous concentrationof these regions is from 1×10²⁰ to 1×10²¹ atoms/cm³ (typically between2×10²⁰ and 5×10²⁰ atoms/cm³).

A source region or a drain region of the n-channel FET is formed by thisprocess, and in the switching FET, a portion of the n-type impurityregions 316 to 318 formed by the process of FIG. 4A remains. Theseremaining regions correspond to the LDD regions 15 a to 15 f of theswitching FET in FIG. 1.

Next, as shown in FIG. 4C, the resist masks 320 a to 320 c are removed,and a new resist mask 328 is twined. A p-type impurity element (boron isused in this embodiment) is then added, twining impurity regions 329 to330 containing a high concentration of boron. Boron is added here toform impurity regions 333 and 334 at a concentration of 3×10²⁰ to 3×10²¹atoms/cm³ (typically between 5×10²⁰ and 1×10²¹ atoms/cm³) by ion dopingusing diborane (B₂H₆).

Note that phosphorous has already been added to the impurity regions 329to 330 at a concentration of 1×10²⁰ to 1×10²¹ atoms/cm³, but boron isadded here at a concentration of at least 3 times than of thephosphorous. Therefore, the n-type impurity regions already twinedcompletely invert to p-type, and function as p-type impurity regions.

Next, after removing the resist mask 328, the n-type and p-type impurityelements added at various concentrations are activated. Furnaceannealing, laser annealing, or lamp annealing may be performed as ameans of activation. Heat treatment is performed in this embodiment in anitrogen atmosphere for 1 hours at 800° C. in an electric furnace.

Before performing the above mentioned activation, the gate insulatingfilm 307 is removed in a self aligning manner as the gate electrodes 308to 312 as masks. The well-known salicide process is performed, and asilicide layer can be formed on the source region and the drain regionof FET. At this time, the thermal process can be performed moreover toform the silicide layer at the above mentioned activation.

A first interlayer insulating film 331 is formed next, as shown in FIG.4D. A single layer insulating film containing silicon is used as thefirst interlayer insulating film 331, while a lamination film may becombined in between. Further, a film thickness of between 400 nm and 1.5μm may be used. A lamination structure of an 800 nm thick silicon oxidefilm on a 200 nm thick silicon nitride oxide film is used in thisembodiment.

In addition, heat treatment is performed for 1 to 12 hours at 300 to450° C. in an environment containing between 3 and 100% hydrogen,performing hydrogenation. This process is one of hydrogen termination ofdangling bonds in the semiconductor film by hydrogen which is thermallyactivated. Plasma hydrogenation (using hydrogen activated by a plasma)may also be performed as another means of hydrogenation.

Note that the hydrogenation step may also be inserted during theformation of the first interlayer insulating film 331. Namely, hydrogenprocessing may be performed as above after forming the 200 nm thicksilicon nitride oxide film, and then the remaining 800 nm thick siliconoxide film may be formed.

Next, a contact hole is formed in the first interlayer insulating film331, and source wiring lines 332 to 335 and drain wiring lines 336 to338 are formed. In this embodiment, this electrode is made of a laminatefilm of three-layer structure in which a titanium film having athickness of 100 nm, an aluminum film containing titanium and having athickness of 300 nm, and a titanium film having a thickness of 150 nmare continuously formed by a sputtering method. Of course, otherconductive films may be used.

A first passivation film 339 is formed next with a thickness of 50 to500 nm (typically between 200 and 300 nm). A 300 nm thick siliconnitride oxide film is used as the first passivation film 339 in thisembodiment. This may also be substituted by a silicon nitride film. Notethat it is effective to perform plasma processing using a gas containinghydrogen such as H₂ or NH₃ etc. before the formation of the siliconnitride oxide film. Hydrogen activated by this preprocess is supplied tothe first interlayer insulating film 331, and the film quality of thefirst passivation film 339 is improved by performing heat treatment. Atthe same time, the hydrogen added to the first interlayer insulatingfilm 331 diffuses to the lower side, and the active layers can behydrogenated effectively.

Next, as shown in FIG. 5A, a second interlayer insulating film 340 madeof organic resin is fanned. As the organic resin, it is possible to usepolyimide, polyamide, acryl, BCB (benzocyclobutene) or the like.Especially, since the second interlayer insulating film 340 is primarilyused for flattening, acryl excellent in flattening properties ispreferable. In this embodiment, an acrylic film is formed to a thicknesssufficient to flatten a stepped portion formed by FETs. It isappropriate that the thickness is preferably made 1 to 5 μm (morepreferably, 2 to 4 μm).

A contact hole reaching a drain wiring line 338 is farmed through thesecond interlayer insulating film 340 and the first passivation film 339and a pixel electrode 341 is formed. In this embodiment, as a pixelelectrode 341, as aluminum alloy film of 300 nm thickness (an aluminumfilm contains 1 wt % titanium).

Next, an insulating film 342 is formed as shown in FIG. 5B. Theinsulating film 342 is formed by patterning the organic resin film orthe insulating film contains 10˜300 nm thick silicon. This insulatingfilm 342 is formed to fill the space between pixels (pixel electrodes).This insulating film 342 is formed for organic EL material, which isformed next, of luminescence layer not to overlap the edge portion ofpixel electrode 341.

A light-emitting layer 343 is next formed by the spin coating method.Specifically, an organic EL material that becomes the light-emittinglayer 343 is dissolved in a solvent such as chloroform, dichloromethane,xylene, toluene, and tetrahydrofuran, and is then applied. Thereafter,heat treatment is performed to volatilize the solvent. A film(light-emitting layer) made of the organic EL material is thus formed.In this embodiment, a paraphenylene vinylene is used for thelight-emitting layer luminescing green color. The light-emitting layeris formed to a thickness of 50 nm. In addition, 1.2-dichloromethane isused as a solvent, and then volatilized by performing heat treatment ona hot plate at 80 to 150° C. for 1 minute.

Next, a hole injection layer 344 is formed to a thickness of 20 nm.Since the hole injection layer 344 may be provided commonly for all thepixels, it is appropriate to form the hole injection layer 349 byutilizing the spin coating method. In Embodiment 1, polythiophene(PEDOT) is applied as a solution, and heat treatment is performed on ahot plate at 100 to 150° C. for 1 to 5 minutes to thereby volatilize itsmoisture. In this case, the hole injection layer 349 can be formedwithout dissolving the light-emitting layer 348 because polyphenylenevinylene is insoluble.

As a hole injection layer 344, other polymer organic material andmonomer organic material can be used. In the case of using monomerorganic material, evaporation method can be used to form a holeinjection layer 344. The inorganic material can also be used.

A two-layered structure made of the light-emitting layer and the holeinjection layer is formed in this embodiment. However, other layers suchas a hole transporting layer, an electron injection layer, and anelectron transporting layer may also be provided. Examples of variouslamination structures of such combination of layers have been reported,and any structure may be used for the present invention.

After the formation of the light-emitting layer 343 and the holeinjection layer 344, an anode 345 made of a small work functiontransparent conductive film is formed to a thickness of 120 nm. Indiumoxide, which is doped with 10 to 20 wt % of zinc oxide, is used for thetransparent conductive film in this embodiment. As the film depositionmethod, it is preferable to use a evaporation method at room temperatureso that the light-emitting layer 343 and the hole injection layer 344are not deteriorated.

A second passivation film 346 made of a silicon oxide nitride film isformed to a thickness of 300 nm by plasma CVD after the formation of theanode 345. At this point, it is also necessary to pay attention to thefilm deposition temperature. The remote plasma CVD may be employed tolower the film deposition temperature.

An active matrix substrate having a structure as shown in FIG. 5B isthus completed. Note that after the formation of the insulating film342, it is effective to use the multi-chamber method (or the in-linemethod) of the thin film deposition apparatus for the process of fog thefilms until the formation of the passivation film 346, in succession andwithout exposure to the atmosphere.

In the active matrix substrate of this embodiment, FETs having optimalstructures are arranged not only in the pixel portion but also in thedriver circuit portion, thereby indicating an extremely high reliabilityand increasing its operation performance.

First, a FET having a structure to decrease hot carrier injection so asnot to drop the operation speed thereof as much as possible is used asan n-channel FET 205 of a CMOS circuit forming a driver circuit portion.Note that the driver circuit here includes a shift register, a buffer, alevel shifter, a sampling circuit (sample and hold circuit), a D/Aconverter and the like. In the case of this embodiment, as shown in FIG.5B, an active layer of the n-channel FET 205 is composed of a sourceregion 355, a drain region 356, an LDD region 357, and a channel formingregion 358. The LDD region 357 overlaps the gate electrode 309 via thegate insulating film 307. This structure is identical to the structureof the current control FET 202.

Consideration not to drop the operation speed is the reason why the LDDregion is formed at only the drain region side. In this n-channel FET205, it is not necessary to pay attention to an OFF current value verymuch, rather, it is better to give importance to an operation speed.Thus, it is desirable that the LDD region 357 is made to completelyoverlap the gate electrode to decrease a resistance component to aminimum.

The p-channel FET 206 in the CMOS circuit includes the source region329, the drain region 330 and the channel formation region 359.Furthermore, deterioration due to the injection of hot carriers isalmost negligible, and thus, it is not necessary to provide any LDDregion especially, but it is also possible to provide.

Note that, in practice, it is preferable to additionally performpackaging (sealing) after completing up through FIG. 5B by using ahighly airtight protective film which has very little gas leakage (suchas a laminate film or an ultraviolet cured resin film) or a sealingmaterial that is transmissive, so that there is no exposure to theatmosphere. By making the inside of the sealing material an inertenvironment, an inert liquid material and an inert solid material and byplacing a drying agent (for example, barium oxide) within the sealingmaterial, the reliability of the EL element is increased.

Furthermore, after the airtightness is increased by the packingprocessing etc., a connector (a flexible printed circuit, FPC) forconnecting output terminals from elements or circuits formed on thesubstrate and external signal terminals, is attached, completing aelectronic equipment using EL element. The electronic equipment of thisspecification includes a connector for input a signal from outside andintegral circuit which is connected to the connector.

Here, the example of circuit structure of the EL display device of thisembodiment will be described with reference in FIG. 7. The EL displaydevice of this embodiment is constituted by a source side driver circuit701, a pixel portion 708, and a gate side driver circuit 709. Further,in this embodiment, the driver circuit portion is a general termincluding the source side processing circuit and the gate side drivercircuit.

In this embodiment, an n-channel FET having multi gate structure isprovided as a switching FET in the pixel portion 708, the switching FETis arranged to the intersection of gate wiring and source wiring whichis connected to the gate side driver circuit 709 and the source sidedriver circuit 701 respectively. Further, the drain of the switching FETis connected to the gate of type current control FET electrically.

The source side driver circuit 701 is provided with a shift register702, a buffer 703, a latch (A) 704, a buffer 705, a latch (B) 706 and abuffer 707. Further, in the case of analog driver, the sampling circuitis provided instead of a latch (A) and a latch (B). The gate side drivercircuit 709 is provided with a shift register 710, and a buffer 711.

Further, not shown in the figure, the gate side driver circuit can beprovided moreover at the opposite side of the gate driver circuit 709via the pixel portion 708. In this case, the both side own jointly gatewirings in the same structure, if the one is destroyed, the other onesend a gate signal to operate a pixel portion correctly.

The foregoing structure can be easily realized by manufacturing FETs inaccordance with the manufacturing processes shown in FIGS. 3 to 5. Inthis embodiment, although only the structure of the pixel portion andthe driver circuit portion is shown, if the manufacturing processes ofthis embodiment are used, it is possible to form a logical circuit, suchas a signal dividing circuit, a D/A converter circuit, an operationalamplifier circuit, a γ-correction circuit, on the same substrate, andfurther, it is considered that a memory portion, a microprocessor, orthe like can be formed.

Furthermore, an explanation of the EL display device of this embodiment,after containing the sealing material to protect an EL element, is madeusing FIGS. 8A and 8B. Note that, when necessary, the symbols used inFIG. 7 is cited.

FIG. 8A is a diagram showing the top view of a state of complete sealingprocess to protect the EL element. Indicated by dotted lines, referencenumeral 701 denotes a source side driver circuit, 708 denotes a pixelportion, 709 denotes a gate side driver circuit. Reference numeral 801denotes a cover material, 802 denotes a first seal member, 803 denotes asecond seal member and a filling material (not shown in the figure) isprovided between an active matrix substrate and inside cover material801 which is enclosed by the first seal member 802.

Further, reference numeral 804 denotes a connection wiring to transmitthe signal which is input to the source side driver circuit 701 and thegate side driver circuit 709. The connection wiring accepts a videosignal and clock signal from a outside input terminal FPC 805.

Here, the cross-sectional view taken along line A-A of FIG. 8A is shownin FIG. 8B. It is to be noted that the same reference numerals are usedfor the same components in FIGS. 8A and 8B.

As shown in FIG. 8B, the pixel portion 708 and the gate side drivercircuit 709 are formed on the single crystal silicon substrate. Thepixel portion 708 is formed of a plurality of pixels including thecurrent control FET 202 and the pixel electrode 341 which iselectrically connected to the drain of the current control FET 202.Further, the gate side driver circuit 709 is formed by using a CMOScircuit that is a complementary combination of the n-channel FET 205 andthe p-channel FET 206.

The pixel electrode 341 functions as the cathode of the EL element. Inaddition, the insulating film 342 is formed on both ends of the pixelelectrode 341, and the light-emitting layer 343 and the hole injectionlayer 344 are formed. The anode 345 of the EL element and the secondpassivation film 346 are further formed on the top.

In the case of this embodiment, the anode 345 also functions as a commonwiring to all the pixels, and is electrically connected to the FPC 805through the connection wiring 804. Furthermore, all the elementscontained in the pixel portion 708 and the gate side driver circuit 709are covered by the second passivation film 346. The second passivationfilm 346 can be omitted, however it is preferable to provide forshielding from outside.

Next, after forming a first seal member 802 by a dispenser, scattering aspacer (not shown in the figure) to glue a cover material 801. Thespacer is scattered to maintain the distance between an active matrixsubstrate and cover material 801. And, the filling material 807 isfilled inside of the first seal member 802 by a vacuum injecting method.In the foregoing process, the technique, which is used in a cellassembling process of liquid crystal display, can be used. It ispreferable to use a photo curing resin as the first seal member 802, buta thermally curable resin may also be used provided that the thermalresistance of the EL layer permits. Note that it is preferable that thefirst seal member 802 be a material through which as little moisture andoxygen as possible are transmitted. Further, a drying agent may also beadded to the inside of the first seal member 802.

Next, a filling material 807 is provided so as to cover the EL element.The filling material 807 also functions as an adhesive for gluing thecover material 801. As the filling material 807, polyimide, acryl, PVC(polyvinyl chloride), epoxy resins, silicon resins, PVB (polyvinylbutyral) or EVA (ethylene vinyl acetate) can be used.

It is preferable to place a drying agent (not shown in the figure)inside the filling material 807 because the absorbent effect can bemaintained. At this point, the drying agent may be an agent doped intothe filling material, or an agent enclosed in the filling material.Further, as above-mentioned spacer (not shown in the figure), it iseffective to use an absorbent material. However, a material havingtransmissivity is used in the case of this embodiment to thereby emitlight from the side of the filling material 807.

Further, in this embodiment, a glass plate, a quartz plate, a plasticplate, a ceramic plate, an FRP (Fiberglass-Reinforced Plastics) plate,PVF (polyvinyl fluoride) film, a milar film, a polyester film, or anacrylic film can be used as the cover material 801. In this embodiment,the cover material 801 must have transmissivity same as fillingmaterial.

After using the filling material 807 to glue the cover material 801, thesecond seal member 803 is next attached so as to cover a side surface(the exposed surface) of the first seal member 802. The second sealmember 803 can use the same material as the first seal member 802.

The EL element is thus sealed into the filling material 807 by using theabove procedure, to thereby completely cut off the EL element from theexternal atmosphere and to prevent the penetration of substances such asmoisture and oxygen from the outside which stimulate the deteriorationof the EL element due to the oxidation of the EL layer. Accordingly,highly reliable EL display devices can be manufactured.

Embodiment 2

In this embodiment, an example of a case in which a pixel constitutionshown in FIG. 9 differs from that of the circuit diagram (constitution)shown in FIG. 2B. Note that in this embodiment, reference numeral 901denotes source wiring of a switching FET 902, 903 denotes a gate wiringof a switching FET 902, 904 denotes a current control FET, 905 denotes acapacitor, 906 and 908 denote electric current supply lines, and 907denotes an EL element.

It is to be noted that the capacitor 905 employs for maintenance ofelectric potential of a gate capacitance of the current control FET 904.Substantially, the capacitor 905 is not provided, and therefore it isindicated by a dotted line.

FIG. 9A is an example of a case in which the electric current supplyline 906 is common between two pixels. Namely, this is characterized inthat the two pixels are formed having linear symmetry around theelectric current supply line 906. In this case, the number of theelectric current supply line can be reduced, and therefore the pixelportion can be made with higher definition.

Further, FIG. 9B is an example of a case in which the electric currentsupply line 908 is formed parallel to the gate wiring 903. Note that inFIG. 9B, the structure is formed such that the electric current supplyline 908 and the gate wiring 903 not to overlap. If both lines areformed in different layer respectively, they can be need to overlapthrough an insulating film. In this case, the exclusive surface area canbe shared by the electric current supply line 908 and the gate wiring903, and the pixel portion can be made with higher definition.

Furthermore, FIG. 9C is characterized in that the electric currentsupply line 908 and the gate wiring 903 a, 903 b are foamed in parallel,similar to the structure of FIG. 9B, and additionally, in that the twopixels are formed so as to have linear symmetry around the electriccurrent supply line 908. In addition, it is effective to fowl theelectric current supply line 908 so as to overlap with one of the gatewirings 903 a, 903 b. In this case, the number of electric currentsupply lines can be reduced, and therefore the pixel portion can be madewith higher definition.

In addition, it is effective to employ the EL display device having thepixel structure of this embodiment as the display portion of theelectronic equipment of Embodiment 1.

Embodiment 3

In this embodiment, examples in which the element structure of theelectric current controlling FET 202 shown in FIG. 1 is made a differentone, will be described with reference to FIGS. 10A to 10D. Specifically,examples in which the arrangement of the LDD region is made a differentone, will be described. Incidentally, the same portions as those of theelectric current controlling FET 202 shown in FIG. 1 are designated bythe same symbols.

An electric current controlling FET 202A shown in FIG. 10A is an examplein which the LDD region 33 is omitted from the electric currentcontrolling FET 202 shown in FIG. 1. In the case shown in FIG. 1, sincethe switching FET 201 has a triple-gate structure, an off current valueis very small, and if a digital driving system is used, the capacitanceof a capacitor for holding the electric potential of the gate of theelectric current controlling FET 202A may be very small.

Thus, as shown in FIG. 10A of this embodiment, it is possible to holdthe electric potential of the gate of the electric current controllingFET 202A only by a gate capacitance formed between a gate electrode 35and a drain region 32.

Next, an electric current controlling FET 202B shown in FIG. 10B is anexample in which a gate electrode 35 overlaps with a part of an LDDregion 51 through a gate insulating film. In this case, a portion of theLDD region 51 not overlapping with the gate electrode 35 functions as aresistor so that it has an effect of decreasing the off current value.That is, by making the structure of FIG. 10B, it is possible to realizeboth suppression of deterioration due to hot carrier injection andlowering of the off electric current value at the same time.

Next, an electric current controlling FET 202C shown in FIG. 10C is anexample in which the LDD region 51 shown in FIG. 10B is provided at notonly the side of the source region 31 but also at the side of the drainregion 32. In this embodiment, an additional region is made an LDDregion 52. Such a structure is an effective structure in the case wherethe direction of flow of electrons is changed (source region and drainregion are inverted) like a sampling circuit used in an analog drivingsystem.

Thus, it is also possible to use the structure of FIG. 10C for aswitching FET. Also in that case, it is possible to realize both thesuppression of deterioration due to the hot carrier injection and thelowering of the off current value at the same time.

Next, an electric current controlling FET 202D shown in FIG. 10D is anexample in which the LDD region 33 shown in FIG. 1 is provided at boththe side of the source region 31 and the side of the drain region 32. Inthis embodiment, an additional region is made an LDD region 53. Such astructure is an effective structure in the case where the direction offlow of electrons is changed like a sampling circuit used in an analogdriving system.

Incidentally, any of the structures of this embodiment can besubstituted for the electric current controlling FET 202 of theembodiment 1, and can also be combined with the embodiment 2.

Embodiment 4

In this embodiment, a description will be made on a case where aplurality of EL display devices of the present invention are fabricatedby using a large substrate (large wafer). Top views of FIGS. 11A to 13Fare used for the description. Incidentally, sectional views taken alongline A-A′ and B-B′ are also shown in the respective top views. Inparticular, for FIG. 11A, the sectional view taken along line A-A′ isshown in FIG. 11B and the sectional view taken along line B-B′ is shownin FIG. 11C. For FIG. 11D, the sectional view taken along line A-A′ isshown in FIG. 11E and the sectional view taken along line B-B′ is shownin FIG. 11F. For FIG. 12A, the sectional view taken along line A-A′ isshown in FIG. 12B and the sectional view taken along line B-B′ is shownin FIG. 12C. For FIG. 12D, the sectional view taken along line A-A′ isshown in FIG. 12E and the sectional view taken along line B-B′ is shownin FIG. 12F. For FIG. 13A, the sectional view taken along line A-A′ isshown in FIG. 13B and the sectional view taken along line B-B′ is shownin FIG. 13C. For FIG. 13D, the sectional view taken along line A-A′ isshown in FIG. 13E and the sectional view taken along line B-B′ is shownin FIG. 13F.

FIG. 11A is a view showing a state where a seal member is formed on anactive matrix substrate fabricated in the embodiment 1. Referencenumeral 61 designates the active matrix substrate, and first sealmembers 62 are provided at plural places. The first seal member 62 isformed while an opening portion 63 is secured.

A filler (rod-like spacer) may be added in the first seal member 62.Besides, spherical spacers 64 are sprinkled on the whole active matrixsubstrate 61. The spacers 64 may be sprinkled, before or after formationof the first seal member 62. In either case, it is possible to securethe distance between the active matrix substrate 61 and a cover memberover the active matrix substrate 61 by the filler (not shown) or thespacers 64.

Incidentally, in view of suppression of deterioration of the EL element,it is effective to make the spacer 64 have a hygroscopic property.Besides, it is desirable that the spacer 64 is made of a materialtransmitting light emitted from the luminescent layer.

A pixel portion and a driving circuit portion are included in a region65 surrounded by the seal member 62. In this specification, a portionconstituted by the pixel portion and the driving circuit portion iscalled an active matrix portion. That is, the active matrix substrate 61is fanned such that a plurality of active matrix portions each beingmade of a combination of the pixel portion and the driving circuitportion are fanned on one large substrate.

FIG. 11D shows a state where a cover member 66 is bonded to the activematrix substrate 61. In this specification, a cell including the activematrix substrate 61, the first seal member 62, and the cover member 66is called an active matrix cell.

A process similar to a cell assembling step of liquid crystal may beused for the above bonding. Besides, as the cover member 66, atransparent substrate (or transparent film) having the same area as theactive matrix substrate 61 may be used. Thus, in the state of FIG. 11D,it is used as the cover member common to all the active matrix portions.

After the cover member 66 is bonded, the active matrix cell is dividedinto parts. In this embodiment, when the active matrix substrate 61 andthe cover member 66 are divided into parts, a scriber is used. Thescriber is such a device that after a thin groove (scribe groove) isformed in the substrate, shock is given to the scribe groove to generatea crack along the scribe groove so that the substrate is divided intoparts.

Incidentally, as a device for dividing a substrate into parts, a diceris also known. The dicer is such a device that a hard cutter (alsoreferred to as dicing saw) is rotated at high speed and is put to asubstrate to divide it into parts. However, when the dicer is used,water is jetted to the dicing saw to prevent heat generation and splashof abrasive powder. Thus, in the case where the EL display device isfabricated, it is desirable to use the scriber, which does not usewater.

As the sequence of fowling the scribe groove in the active matrixsubstrate 61 and the cover member 66, first, a scribe groove 67 a isformed in the direction of the arrow (a), and next, a scribe groove 67 bis formed in the direction of the arrow (b). At this time, the scribegroove passing through the vicinity of the opening portion 63 is formedto cut the first seal member 62. By doing so, since the opening portion63 appears at the end face of the active matrix cell, a subsequentinjection step of a filler is facilitated.

When the scribe grooves are formed in this way, a shock is given to thescribe grooves by an elastic bar of silicone resin or the like togenerate cracks, so that the active matrix substrate 61 and the covermember 66 are divided into parts.

FIG. 12A shows the state after the first division, and active matrixcells 68 and 69 each including two active matrix portions are formedthrough the division. Next, a filler 70 is injected into a space fowledof the active matrix substrate 61, the first seal member 62 and thecover member 66 by a vacuum injection method. Since the vacuum injectionmethod is well known as a technique of injecting liquid crystal, itsexplanation is omitted. At this time, it is preferable that theviscosity of the filler 70 is 3 to 15 cp. The filler having suchviscosity may be selected, or desired viscosity may be made by dilutionwith a solvent or the like. Besides, the vacuum injection method may becarried out in the state where a drying agent is added in the filler.

In this way, the filler 70 is filled as shown in FIG. 12A. Incidentally,although this embodiment shows a system in which the filler 70 is filledinto the plurality of active matrix cells at the same time, the systemlike this is suitable for fabrication of a small EL display device witha diagonal of about 0.5 to 1 inch. On the other hand, when a large ELdisplay device with a diagonal of about 5 to 30 inches is fabricated, itis appropriate that after division into the respective active matrixcells is made, the filler 70 is filled.

After the filler 70 is filled in the manner described above, the filler70 is hardened so that the adhesiveness between the active matrixsubstrate 61 and the cover member 66 is further raised. When the filler70 is an ultraviolet ray curing resin, ultraviolet rays are irradiated,and when it is a thermosetting resin, heating is made. However, in thecase where the thermosetting resin is used, attention must be paid tothe heat resistance of the organic EL material.

Next, scribe grooves are again formed in the active matrix substrate 61and the cover member 66. As the sequence, first, a scribe groove 71 a isformed in the direction of the arrow (a), and next, a scribe groove 71 bis formed in the direction of the arrow (b). At this time, the scribegrooves are foamed so that the area of the cover member 66 becomes smallas compared with the active matrix substrate 61 after the division.

After the scribe grooves are formed in this way, a shock is given to thescribe grooves by an elastic bar of silicone resin or the like togenerate cracks, so that division into active matrix cells 72 to 75 ismade. FIG. 13A shows the state after the second division. Further, anFPC 76 is attached to each of the active matrix cells 72 to 75.

Finally, as shown in FIG. 13D, a second seal member 77 is foamed so asto cover the substrate end face (exposed face of the first seal member62 or the filler 70) of each of the active matrix cells 72 to 75 and theFPC 76. The second seal member 77 may be foamed of an ultraviolet raycuring resin or the like in which degassing hardly occurs.

By the process described above, the EL display device as shown in FIG.13D is completed. As described above, by carrying out this embodiment, aplurality of EL display devices can be fabricated from one substrate.For example, from a substrate of 620 mm×720 mm, six EL display deviceseach having a diagonal of 13 to 14 inches can be foamed, or four ELdisplay devices each having a diagonal of 15 to 17 inches can be formed.Thus, a throughput can be greatly improved and manufacturing costs canbe reduced.

Incidentally, the fabricating process of an EL display device of thisembodiment can be used for fabrication of an EL display device includingany structure of the embodiments 1 to 3.

Embodiment 5

In this embodiment, a description will be made on an example of a casewhere the filler 70 is not used in the embodiment 4. This embodiment ischaracterized in that after an active matrix cell is placed in a vacuum,a dry inert gas pressurized to 1 to 2 atmospheres is sealed in a regionsurrounded by the first seal member 62. As the inert gas, nitrogen orrare gas (typically argon, helium or neon) may be used.

Incidentally, this embodiment can use the process of the embodiment 4 asit is, except that a material vacuum injected in the embodiment 4 ismade a gas. Thus, the fabricating process of the EL display device ofthis embodiment can be used for fabrication of the EL display deviceincluding any structure of the embodiments 1 to 3.

Embodiment 6

In the embodiments 1 to 5, although the description has been made on theEL display device, the present invention can also be used for an activematrix electrochromic display (ECD), field emission display (FED), orliquid crystal display (LCD).

That is, the present invention can be used for any electronic devices inwhich a light-emitting device or a light receiving element iselectrically connected to an FET.

Embodiment 7

The EL display device fabricated in accordance with the presentinvention is of the self-emission type, and thus exhibits more excellentrecognizability of the displayed image in a light place as compared tothe liquid crystal display device. Furthermore, the EL display devicehas a wider viewing angle. Accordingly, the EL display device can beapplied to a display portion in various electronic devices. For example,in order to view a TV program or the like on a large-sized screen, theEL display device in accordance with the present invention can be usedas a display portion of an EL display (i.e., a display in which an ELdisplay device is installed into a frame) having a diagonal size of 30inches or larger (typically 40 inches or larger.)

The EL display includes all kinds of displays to be used for displayinginformation, such as a display for a personal computer, a display forreceiving a TV broadcasting program, a display for advertisementdisplay. Moreover, the EL display device in accordance with the presentinvention can be used as a display portion of other various electricdevices.

Such electronic devices include a video camera, a digital camera, agoggles-type display (head mount display), a car navigation system, asound reproduction device (an audio equipment), note-size personalcomputer, a game machine, a portable information terminal (a mobilecomputer, a portable telephone, a portable game machine, an electronicbook, or the like), an image reproduction apparatus including arecording medium (more specifically, an apparatus which can reproduce arecording medium such as a digital versatile disc (DVD), and includes adisplay for displaying the reproduced image), or the like. Inparticular, in the case of the portable information terminal, use of theEL display device is preferable, since the portable information terminalthat is likely to be viewed from a tilted direction is often required tohave a wide viewing angle. FIGS. 14 and 15 respectively show variousspecific examples of such electronic devices.

FIG. 14A illustrates an EL display which includes a frame 2001, asupport table 2002, a display portion 2003, or the like. The presentinvention is applicable to the display portion 2003. The EL display isof the self-emission type and therefore requires no back light. Thus,the display portion thereof can have a thickness thinner than that ofthe liquid crystal display device.

FIG. 14B illustrates a video camera which includes a main body 2101, adisplay portion 2102, an audio input portion 2103, operation switches2104, a battery 2105, an image receiving portion 2106, or the like. TheEL display device in accordance with the present invention can be usedas the display portion 2102.

FIG. 14C illustrates a portion (the right-half piece) of an EL displayof head mount type, which includes a main body 2201, signal cables 2202,a head mount band 2203, a display portion 2204, an optical system 2205,an EL display device 2206, or the like. The present invention isapplicable to the EL display device 2206.

FIG. 14D illustrates an image reproduction apparatus including arecording medium (more specifically, a DVD reproduction apparatus),which includes a main body 2301, a recording medium (a DVD or the like)2302, operation switches 2303, a display portion (a) 2304, anotherdisplay portion (b) 2305, or the like. The display portion (a) is usedmainly for displaying image information, while the display portion (b)is used mainly for displaying character information. The EL displaydevice in accordance with the present invention can be used as thesedisplay portions (a) and (b). The image reproduction apparatus includinga recording medium further includes a CD reproduction apparatus, a gamemachine or the like.

FIG. 14E illustrates a portable (mobile) computer which includes a mainbody 2401, a camera portion 2402, an image receiving portion 2403,operation switches 2404, a display portion 2405, or the like. The ELdisplay device in accordance with the present invention can be used asthe display portion 2405.

FIG. 14F illustrates a personal computer which includes a main body2501, a frame 2502, a display portion 2503, a key board 2504, or thelike. The EL display device in accordance with the present invention canbe used as the display portion 2503.

When the brighter luminance of light emitted from the EL materialbecomes available in the future, the EL display device in accordancewith the present invention will be applicable to a front-type orrear-type projector in which light including output image information isenlarged by means of lenses or the like to be projected.

The aforementioned electronic devices are more likely to be used fordisplay information distributed through a telecommunication path such asInternet, a CATV (cable television system), and in particular likely todisplay moving picture information. The EL display device is suitablefor displaying moving pictures since the EL material can exhibit highresponse speed. However, if the contour between the pixels becomesunclear, the moving pictures as a whole cannot be clearly displayed.Since the EL display device in accordance with the present invention canmake the contour between the pixels clear, it is significantlyadvantageous to apply the EL display device of the present invention toa display portion of the electronic devices.

A portion of the EL display device that is emitting light consumespower, so it is desirable to display information in such a manner thatthe light-emitting portion therein becomes as small as possible.Accordingly, when the EL display device is applied to a display portionwhich mainly displays character information, e.g., a display portion ofa portable information terminal, and more particular, a portabletelephone or a sound reproduction equipment, it is desirable to drivethe EL display device so that the character information is limped by alight-emitting portion while a non-emission portion corresponds to thebackground.

With now reference to FIG. 15A, a portable telephone is illustrated,which includes a main body 2601, an audio output portion 2602, an audioinput portion 2603, a display portion 2604, operation switches 2605, andan antenna 2606. The EL display device in accordance with the presentinvention can be used as the display portion 2604. The display portion2604 can reduce power consumption of the portable telephone bydisplaying white-colored characters on a black-colored background.

FIG. 15B illustrates a sound reproduction device, a car audio equipmentin concrete term, which includes a main body 2701, a display portion2702, and operation switches 2703 and 2704. The EL display device inaccordance with the present invention can be used as the display portion2702. Although the car audio equipment of the mount type is shown in thepresent embodiment, the present invention is also applicable to an audioof the set type. The display portion 2702 can reduce power consumptionby displaying white-colored characters on a black-colored background,which is particularly advantageous for the audio of the portable type.

As set forth above, the present invention can be applied variously to awide range of electronic devices in all fields. The electronic device inthe present embodiment can be obtained by utilizing an EL display devicehaving the configuration in which the structures in Embodiments 1through 8 are freely combined.

According to the present invention, pixels using FETs having lessfluctuation in characteristics can be realized, and an electronic devicehaving less fluctuation in luminescent properties of light-emittingdevices among pixels and high color reproducibility can be obtained.Besides, by arranging FETs having different structures according to therole in the pixel, an electronic device having high reliability can beobtained.

Further, by using the electronic device of the present invention as adisplay portion, an electronic instrument having high performance andhigh reliability can be obtained.

1-20. (canceled)
 21. A display device comprising: a first substrateincluding a pixel portion; a transistor and a light-emitting elementincluded in the pixel portion, the light-emitting element comprising alight emitting layer including an organic compound; a second substrateover the first substrate; a first sealing material interposed betweenthe first substrate and the second substrate, wherein the first sealingmaterial is disposed along peripheries of the first and secondsubstrates; and a second sealing material formed outside of the firstsealing material, wherein the second sealing material is in contact withside surfaces of the first and second substrates, wherein the secondsealing material comprises a resin, and wherein the pixel portion issealed by the first substrate, the second substrate, the first sealingmaterial, and the second sealing material.
 22. The display deviceaccording to claim 21, wherein at least one of the first sealingmaterial and the second sealing material comprises a drying agent. 23.The display device according to claim 21, wherein at least one of thefirst sealing material and the second sealing material comprises bariumoxide.
 24. The display device according to claim 21, wherein the firstsealing material comprises a resin.
 25. The display device according toclaim 21, wherein the first substrate is a single crystal semiconductorsubstrate.
 26. The display device according to claim 1, furthercomprising a spacer between the first substrate and the secondsubstrate, wherein the spacer comprises an absorbent material.
 27. Thedisplay device according to claim 21, wherein the transistor comprisesLDD region.
 28. A display device comprising: a first substrate includinga pixel portion; a transistor and a light-emitting element included inthe pixel portion, the light-emitting element comprising a lightemitting layer including an organic compound; a second substrate overthe first substrate; a first sealing material interposed between thefirst substrate and the second substrate, wherein the first sealingmaterial is disposed along peripheries of the first and secondsubstrates; and a second sealing material disposed along the peripheriesof the first and second substrates, wherein the second sealing materialis located outside of the first sealing material, wherein the secondsealing material comprises a resin, and wherein the pixel portion issealed by the first substrate, the second substrate, the first sealingmaterial, and the second sealing material.
 29. The display deviceaccording to claim 28, wherein at least one of the first sealingmaterial and the second sealing material comprises a drying agent. 30.The display device according to claim 28, wherein at least one of thefirst sealing material and the second sealing material comprises bariumoxide.
 31. The display device according to claim 28, wherein the firstsealing material comprises a resin.
 32. The display device according toclaim 28, wherein the first substrate is a single crystal semiconductorsubstrate.
 33. The display device according to claim 28, furthercomprising a spacer between the first substrate and the secondsubstrate, wherein the spacer comprises an absorbent material.
 34. Thedisplay device according to claim 28, wherein the transistor comprisesLDD region.
 35. A display device comprising: a first substrate includinga pixel portion; a transistor and a light-emitting element included inthe pixel portion, the light-emitting element comprising a lightemitting layer including an organic compound; a second substrate overthe first substrate; a filling material over the transistor and thelight-emitting element; a first sealing material interposed between thefirst substrate and the second substrate, wherein the first sealingmaterial is disposed along peripheries of the first and secondsubstrates; and a second sealing material formed outside of the firstsealing material, wherein the second sealing material is in contact withside surfaces of the first and second substrates, wherein the secondsealing material comprises a resin, and wherein the pixel portion andthe filling material are sealed by the first substrate, the secondsubstrate, the first sealing material, and the second sealing material.36. The display device according to claim 35, wherein at least one ofthe first sealing material and the second sealing material comprises adrying agent.
 37. The display device according to claim 35, wherein atleast one of the first sealing material and the second sealing materialcomprises barium oxide.
 38. The display device according to claim 35,wherein the first sealing material comprises a resin.
 39. The displaydevice according to claim 35, wherein the first substrate is a singlecrystal semiconductor substrate.
 40. The display device according toclaim 35, wherein the filling material comprises a drying agent.
 41. Thedisplay device according to claim 35, wherein the filling materialcomprises an adhesive.
 42. The display device according to claim 35,further comprising a spacer between the first substrate and the secondsubstrate, wherein the spacer comprises an absorbent material.
 43. Thedisplay device according to claim 35, wherein the transistor comprisesLDD region.
 44. A display device comprising: a first substrate includinga pixel portion; a transistor and a light-emitting element included inthe pixel portion, the light-emitting element comprising a lightemitting layer including an organic compound; a second substrate overthe first substrate; a filling material over the transistor and thelight-emitting element; a first sealing material interposed between thefirst substrate and the second substrate, wherein the first sealingmaterial is disposed along peripheries of the first and secondsubstrates; and a second sealing material disposed along the peripheriesof the first and second substrates, wherein the second sealing materialis located outside of the first sealing material, wherein the secondsealing material comprises a resin, and wherein the pixel portion andthe filling material are sealed by the first substrate, the secondsubstrate, the first sealing material, and the second sealing material.45. The display device according to claim 44, wherein at least one ofthe first sealing material and the second sealing material comprises adrying agent.
 46. The display device according to claim 44, wherein atleast one of the first sealing material and the second sealing materialcomprises barium oxide.
 47. The display device according to claim 44,wherein the first sealing material comprises a resin.
 48. The displaydevice according to claim 44, wherein the first substrate is a singlecrystal semiconductor substrate.
 49. The display device according toclaim 44, wherein the filling material comprises a drying agent.
 50. Thedisplay device according to claim 44, wherein the filling materialcomprises an adhesive.
 51. The display device according to claim 44,further comprising a spacer between the first substrate and the secondsubstrate, wherein the spacer comprises an absorbent material.
 52. Thedisplay device according to claim 44, wherein the transistor comprisesLDD region.